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1 article(s) from Meyer, Fabian

Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources

Nico Klingner,
Gregor Hlawacek,
Paul Mazarov,
Wolfgang Pilz,
Fabian Meyer and
Lothar Bischoff

Beilstein J. Nanotechnol. 2020, 11, 1742–1749, doi:10.3762/bjnano.11.156

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Figure 1: Comparison of the spot size (imaging resolution) as a function of the ion beam current for differen...

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Figure 2: Mass spectrum of a Ga₃₃Bi₅₇Li₁₀ LMAIS at an acceleration potential of 10 kV scanned by the ExB volt...

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Figure 3: Examples using different ions: a) 30 keV He⁺, field of view (FOV): 1.5 × 1.5 µm², trench width: 4 n...

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Figure 4: Summary of the imaging resolution (80/20), experimentally achieved trench width, and simulated mini...

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Figure 5: SRIM simulation [39] of the sputter profile from a 30 keV point-like beam in a gold substrate as a func...

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Figure 6: Comparison of the normalized ion beam profiles (normalized half profiles = beam radius) obtained fr...

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Published 18 Nov 2020

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